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Boekhandel Douwes Den Haag

Spectroscopic Ellipsometry and Reflectometry

A User's Guide

Tompkins, Harland G. (Motorola, Inc.) & McGahan, William A. (Nanometrics, Inc.)

Spectroscopic Ellipsometry and Reflectometry

Spectroscopic Ellipsometry and Reflectometry

A User's Guide

Spectroscopic Ellipsometry and Reflectometry

 

While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry.

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Beschrijving Spectroscopic Ellipsometry and Reflectometry

While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry.

ISBN
9780471181729
Pagina's
248
Verschenen
NUR
950
Druk
1
Uitvoering
Hardback
Taal
Engels
Uitgever
John Wiley & Sons Inc

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