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High-k Gate Dielectrics for CMOS Technology

He, G

High-k Gate Dielectrics for CMOS Technology

High-k Gate Dielectrics for CMOS Technology

High-k Gate Dielectrics for CMOS Technology

 

A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions.


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Beschrijving High-k Gate Dielectrics for CMOS Technology

A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions.


ISBN
9783527330324
Pagina's
590
Verschenen
NUR
950
Druk
1
Uitvoering
Hardback
Taal
Engels
Uitgever
Wiley-VCH Verlag GmbH

Technische wetenschappen