Press Monographs
Technology and Applications
Press Monographs
Technology and Applications
Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. This work contains useful details in design and processing and can be utilized as a reference book or as a textbook.
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Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. This work contains useful details in design and processing and can be utilized as a reference book or as a textbook.
