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Tutorial Texts

Resolution Enhancement Techniques in Optical Lithography

Wong, Alfred Kwok-Kit

Resolution Enhancement Techniques in Optical Lithography

Tutorial Texts

Resolution Enhancement Techniques in Optical Lithography

Tutorial Texts: Resolution Enhancement Techniques in Optical Lithography

 

The acceleration of integrated circuit miniaturization is challenging lithographers to push the limits of optical lithography by ever more precise engineering and innovations. This work summarizes the latest enhancement research that has matured since the 1980s.


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Beschrijving Tutorial Texts: Resolution Enhancement Techniques in Optical Lithography

The acceleration of integrated circuit miniaturization is challenging lithographers to push the limits of optical lithography by ever more precise engineering and innovations. This work summarizes the latest enhancement research that has matured since the 1980s.


ISBN
9780819439956
Pagina's
214
Verschenen
Serie
Tutorial Texts
Rubriek
Exacte wetenschappen/natuurwetenschappen
Druk
1
Uitvoering
Paperback
Taal
Nederlands
Uitgever
Society of Photo Optical