Press Monographs
Press Monographs
An authoritative reference book on EUV source technology. Topics range from an overview of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of DPP and LPP designs and other technologies for producing EUV radiation.
Bezorgen: Zodra beschikbaar
An authoritative reference book on EUV source technology. Topics range from an overview of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of DPP and LPP designs and other technologies for producing EUV radiation.
