Press Monographs
Press Monographs
A guide to advanced processes and materials used in 193-nm immersion lithography (193i). It provides techniques for selecting critical materials (topcoats, photoresists, and antireflective coatings), and optimizing immersion processes to ensure higher performance and lower defectivity at lower cost.
Bezorgen: Zodra beschikbaar
A guide to advanced processes and materials used in 193-nm immersion lithography (193i). It provides techniques for selecting critical materials (topcoats, photoresists, and antireflective coatings), and optimizing immersion processes to ensure higher performance and lower defectivity at lower cost.
