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Boekhandel Douwes Den Haag

Plasma Electronics

Applications in Microelectronic Device Fabrication

Zoran Lj. (University of Belgrade Petrovic & Toshiaki (Keio University Makabe

Plasma Electronics

Plasma Electronics

Applications in Microelectronic Device Fabrication

Plasma Electronics

Verschijnt binnenkort

 

Plasma Electronics: Applications in Microelectronic Device Fabrication, Third Edition, explains the fundamental physics and numerical methods essential for advancing these technologies from laboratory research to manufacturing-scale modeling and design of plasma sources and processes.

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Beschrijving Plasma Electronics

Plasma Electronics: Applications in Microelectronic Device Fabrication, Third Edition, explains the fundamental physics and numerical methods essential for advancing these technologies from laboratory research to manufacturing-scale modeling and design of plasma sources and processes.

ISBN
9781041192237
Pagina's
389
Verschijnt
Rubriek
Exacte wetenschappen/natuurwetenschappen
Druk
1
Uitvoering
Hardback
Taal
Engels
Uitgever
Taylor & Francis Ltd

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