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Topics in Applied Physics

Ion Implantation and Annealing Applications, Science and Technology

Contributions from IIT School, Edition 2024

Ion Implantation and Annealing Applications, Science and Technology

Topics in Applied Physics

Ion Implantation and Annealing Applications, Science and Technology

Contributions from IIT School, Edition 2024

Topics in Applied Physics: Ion Implantation and Annealing Applications, Science and Technology

Verschijnt binnenkort

 

This book compiles the insights and teachings from the 2024 IIT School lectures, offering a comprehensive look at ion implantation and annealing in semiconductor manufacturing. It covers the history of integrated circuits, common applications in CMOS technology, ion sources, radiation damage, annealing of materials like silicon (Si), silicon carbide (SiC) and gallium nitride (GaN), and advances in cluster ion beam technology.

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Beschrijving Topics in Applied Physics: Ion Implantation and Annealing Applications, Science and Technology

This book compiles the insights and teachings from the 2024 IIT School lectures, offering a comprehensive look at ion implantation and annealing in semiconductor manufacturing. It covers the history of integrated circuits, common applications in CMOS technology, ion sources, radiation damage, annealing of materials like silicon (Si), silicon carbide (SiC) and gallium nitride (GaN), and advances in cluster ion beam technology. This edition, enriched by expert contributions, serves as an essential reference for students and professionals in materials science and microelectronics.

ISBN
9783032100078
Pagina's
628
Verschijnt
Serie
Topics in Applied Physics
Rubriek
Exacte wetenschappen/natuurwetenschappen
Druk
1
Uitvoering
Hardback
Taal
Engels
Uitgever
Springer Nature Switzerland AG

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