Boekhandel Douwes Den Haag

Capacitive Silicon Resonators

Performance Enhancement Methods

Ono, Takahito & Van Toan, Nguyen

Capacitive Silicon Resonators

Capacitive Silicon Resonators

Performance Enhancement Methods

Capacitive Silicon Resonators

 

"Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators.


Nog te verschijnen

€ 134,40

Bezorgen: Zodra beschikbaar


Beschrijving Capacitive Silicon Resonators

Recent progress in performance enhancement methods for capacitive silicon resonator will be outlined in this work. Several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, will be discussed.


ISBN
9780367217761
Pagina's
162
Verschenen
NUR
950
Druk
1
Uitvoering
Hardback
Taal
Engels
Uitgever
Taylor & Francis Ltd

Technische wetenschappen